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Glossary terms about Detection limit

Detection limit
The lowest amount of an analyte in a sample that can be detected but not necessarily quantified

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Accuracy, Precision and Detection Limits
The minimum detection limit is the concentration corresponding to a peak that can just be distinguished statistically from background fluctuations. 
Background information - What is energy dispersive X-ray spectroscopy?
The detection limit of EDS analysis in the SEM depends on the composition of the sample being analysed, but is in the range 0. 
Two of the most important considerations in microanalysis are spatial resolution, or the size of the object or particle to be analysed, and the detection limit of the technique. 
Quantitative EDS X-ray microanalysis using SEM
The beam current should be adjusted to minimize damage to the sample but generate sufficient X-rays to allow reliable quantification (see Precision and Accuracy and Detection Limits).