Secondary Ion Mass Spectrometry
Sample chamber and stage
This is where the primary beam hits the solid sample under analysis, generating secondary ions by the impact.
The sample is typically placed into a holder and loaded into the sample chamber. This allows for sample navigation and movement in three dimensions. Samples must be flat with a mirror-like polish, vacuum compatible and conductive. They are typically coated with metal (usually Au or Pt, 10 to 30nm-thick) or carbon to provide conductivity. Some examples of sample holders for the NanoSIMS 50L and LG-SIMS are shown below.